PTP motion control of XY positioning systems with a flexible beam

A PTP motion control method composed of a feedforward and feedback controller is proposed to get accurate positioning and to suppress vibration of a XY positioning system with a flexible beam. The input preshaping based on the analytic modeling and frequency equation of the system is proposed as a feedforward controller to produce desired responses. A feedback controller is proposed based on a robust internal-loop compensator to stabilize the whole system and to meet closed-loop performance. Experiments are carried out to show the validity of the proposed controller.