Transparent chemical vapor deposited β-SiC

Transparent β-SiC has been fabricated by the pyrolysis of methyltrichlorosilane in a hot wall chemical vapor deposition reactor. Characterization of material indicates that transparent SiC is a theoretically dense, highly pure (99.9996%), highly oriented 〈111〉, β-phase (cubic) material possessing high optical transmission in the wavelength region 0.5–6 μm, a high value of hardness, electrical resistivity and thermal conductivity, and a low value of thermal expansion coefficient. These properties make it a good candidate material for use as domes and windows in severe environments such as high speed missiles, laser, combustion and space systems.