Atmospheric Large Sized Remote Plasma Source for Surface Treatment

In Recent years, atmospheric plasma source is widely used for industrial applications, because it does not demand vacuum chamber and pumping system. Also the density and chemical reactivity of atmospheric pressure plasma are much higher than low-pressure plasma. In addition, because of the density is very high, the concentration of contamination species in the plasma will be a negligible quantity, which means high purity plasma. Therefore, atmospheric plasma is expected that one of the best solution to realize the low cost, high speed and purity processing. However, it is not easy to generate large sized plasma under the atmospheric pressure. In this study, pulse or RF operation atmospheric large sized remote plasma source was developed and attached for surface treatment. Hydrophilization of acryl and glass were tested. By plasma irradiation for 30 seconds, the surface tension of acryl and glass were increased from 40 dyn/cm to 70 dyn/cm and 60 dyn/cm to 70 dyn/cm, respectively. The hydrophilic effect remained more than 4 weeks.