材料科学
金属有机气相外延
热稳定性
活化能
化学气相沉积
热分解
挥发
热重分析
钡
蒸发
分析化学(期刊)
化学工程
傅里叶变换红外光谱
物理化学
纳米技术
有机化学
化学
热力学
外延
工程类
酶
冶金
物理
图层(电子)
作者
Teng Zhang,Hongwei Gu,Fazhu Ding,Fei Qu,Shaotao Dai
出处
期刊:Rare Metals
[Springer Science+Business Media]
日期:2013-02-01
卷期号:32 (1): 67-74
被引量:2
标识
DOI:10.1007/s12598-013-0020-6
摘要
Abstract The metal–organic chemical vapor deposition (MOCVD) technique is a promising process for high‐temperature superconductor YBa 2 Cu 3 O 7− δ (YBCO) preparation. In this technique, it is a challenge to obtain barium precursors with high volatility. In addition, the purity, evaporation characteristics, and thermostability of adopted precursors in whole process will decide the quality and reproducible results of YBCO film. In the present report, bis(2,2,6,6‐tetramethyl‐3,5‐heptanedionato)barium(II) (Ba(TMHD) 2 ) was synthesized, and its structure was identified by FTIR, 1 H NMR, 13 C NMR, and ESI–MS spectroscopy. Subsequently, the thermal properties and the kinetics of decomposition were systematically investigated by nonisothermal thermogravimetric analysis methods. Based on the average apparent activation energy evaluated by the Ozawa, Kissinger, and Friedman methods, the volatilization process was discussed, and all results show that Ba(TMHD) 2 is unstable and highly sensitive to the change of temperature during the whole evaporation process. Therefore, it is very important to choose suitable volatilization technology and conditions for avoiding Ba(TMHD) 2 breakdown (or thermal aging) during MOCVD process. Subsequently, the possible conversion function is estimated through the Coats–Redfern method to characterize the evaporation patterns and follows a phase boundary reaction mechanism by the contracting surface equation with average activation energy of 118.7 kJ·mol −1 .
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