绝缘体上的硅
光电子学
硅光子学
材料科学
激光器
光子学
薄脆饼
炸薯条
晶片键合
实现(概率)
硅
光子集成电路
混合硅激光器
直接结合
波导管
光学
物理
计算机科学
电信
统计
数学
作者
Günther Roelkens,L. Liu,Di Liang,Richard Jones,Alex Fang,Brian R. Koch,J. Bowers
标识
DOI:10.1002/lpor.200900033
摘要
Abstract In this paper III‐V on silicon‐on‐insulator (SOI) heterogeneous integration is reviewed for the realization of near infrared light sources on a silicon waveguide platform, suitable for inter‐chip and intra‐chip optical interconnects. Two bonding technologies are used to realize the III‐V/SOI integration: one based on molecular wafer bonding and the other based on DVS‐BCB adhesive wafer bonding. The realization of micro‐disk lasers, Fabry‐Perot lasers, DFB lasers, DBR lasers and mode‐locked lasers on the III‐V/SOI material platform is discussed.
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