Revised Algorithm for Image Sharpness Measurement in Scanning Electron Microscopy Based on Derivative Method in ISO/TS 24597 Document

A standard method of evaluating the resolution, a key performance metric of SEM, is to determine the sharpness of gold-on-carbon sample image.There are several methods of the sharpness calculation, including Fourier transform method, contrast-gradient method and derivative method [1].In the last conference, we reported our implementation of the derivative method as stated in ISO/TS 24596 to calculate the sharpness of (SEM) image [2].Since then we have examined the assumptions, calculation process, and compatibility issues, while revising the algorithm.