显微镜
光学
小型化
分辨率(逻辑)
显微镜
探测器
样品(材料)
毫米
材料科学
断层摄影术
图像分辨率
物理
计算机科学
纳米技术
人工智能
热力学
作者
Christian Fella,Andreas Balles,Randolf Hanke,Arndt Last,Simon Zabler
摘要
With increasing miniaturization in industry and medical technology, non-destructive testing techniques are an area of ever-increasing importance. In this framework, X-ray microscopy offers an efficient tool for the analysis, understanding, and quality assurance of microscopic samples, in particular as it allows reconstructing three-dimensional data sets of the whole sample’s volume via computed tomography (CT). The following article describes a compact X-ray microscope in the hard X-ray regime around 9 keV, based on a highly brilliant liquid-metal-jet source. In comparison to commercially available instruments, it is a hybrid that works in two different modes. The first one is a micro-CT mode without optics, which uses a high-resolution detector to allow scans of samples in the millimeter range with a resolution of 1 μm. The second mode is a microscope, which contains an X-ray optical element to magnify the sample and allows resolving 150 nm features. Changing between the modes is possible without moving the sample. Thus, the instrument represents an important step towards establishing high-resolution laboratory-based multi-mode X-ray microscopy as a standard investigation method.
科研通智能强力驱动
Strongly Powered by AbleSci AI