印刷电路板
材料科学
数码产品
光刻
光刻胶
咬边
抵抗
制作
可靠性(半导体)
电子线路
光电子学
电气工程
纳米技术
工程类
复合材料
医学
物理
量子力学
病理
功率(物理)
替代医学
图层(电子)
作者
C. Hanumanth Rao,Amrendra Pratap Singh,Avinash Kothuru,Bondapalli K. S. V. L. Varaprasad,Sanket Goel
出处
期刊:Journal of micro/nanopatterning, materials, and metrology
[SPIE - International Society for Optical Engineering]
日期:2022-01-05
卷期号:21 (01)
被引量:1
标识
DOI:10.1117/1.jmm.21.1.011003
摘要
Background: High-density interconnect (HDI) printed circuit board (PCB) packaging technology has gained greater significance in military and aerospace sectors. Manufacturing with fineline features and the impedance-controlled circuit pattern is a major technical challenge for which several methods have been reported. Aim: Herein, a novel process of HDI PCB fabrication has been presented using liquid photosensitive resist spray coating followed by digital micromirror device (DMD)-based micro-opto-electromechanical direct imaging photolithography to realize fineline circuit pattern. Approach: A fineline HDI circuit has been developed with minimum conductor trace width of <40 μm and spacing from the copper foil (18-μm thickness) cladded to dielectric substrate that comply the requirements of high reliability space electronics packaging. Such fineline conductor features have been exemplified with optical microscopy, SEM, and subjected to micro-sectioning. Results: The resulting undercut values and etched pattern have been found to be excellent. Leveraging the standard test method, the peel strength values of the realised fineline circuit patterns were measured to be more than 1.2 kg / cm2 required for high reliability space electronics packaging applications. Conclusions: The output paraments meet the space high-reliability requirements withstanding the stringent environmental conditions of ultra-high vacuum, vibration, and the extreme temperatures for longer durations.
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