MEMS technology and applications in geotechnical monitoring: a review

微电子机械系统 系统工程 计算机科学 工程类 材料科学 光电子学
作者
Milad Barzegar,Stan Blanks,Bre‐Anne Sainsbury,Wendy Timms
出处
期刊:Measurement Science and Technology [IOP Publishing]
卷期号:33 (5): 052001-052001 被引量:54
标识
DOI:10.1088/1361-6501/ac4f00
摘要

Abstract In-situ monitoring is an important aspect of geotechnical projects to ensure safety and optimise design measures. However, existing conventional monitoring instruments are limited in their accuracy, durability, complex and high cost of installation and requirement for ongoing real time measurement. Advancements in sensing technology in recent years have created a unique prospect for geotechnical monitoring to overcome some of those limitations. For this reason, micro-electro-mechanical system (MEMS) technology has gained popularity for geotechnical monitoring. MEMS devices combine both mechanical and electrical components to convert environment system stimuli to electrical signals. MEMS-based sensors provide advantages to traditional sensors in that they are millimetre to micron sized and sufficiently inexpensive to be ubiquitously distributed within an environment or structure. This ensures that the monitoring of the in-situ system goes beyond discrete point data but provides an accurate assessment of the entire structures response. The capability to operate with wireless technology makes MEMS microsensors even more desirable in geotechnical monitoring where dynamic changes in heterogeneous materials at great depth and over large areas are expected. Many of these locations are remote or hazardous to access directly and are thus a target for MEMS development. This paper provides a review of current applications of existing MEMS technology to the field/s of geotechnical engineering and provides a path forward for the expansion of this research and commercialisation of products.
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