Simultaneous deposition of DLC film on the internal surface of multiple pipes

Diamond-like carbon (DLC) film effectively prevent the corrosion and wear of the internal surface of the pipe. However, many related reports focus on the deposition of DLC film on internal surface of single pipe, ignoring the importance of mass production. In order to improve production efficiency and achieve single mass production in the industry, it is necessary to explore the deposition technology of multiple pipes. In this paper, multiple pipes were applied with the same negative bias voltage and the high-density plasma was generated through hollow cathode plasma enhanced chemical vapor deposition (HC-PECVD) technology. Multilayer Si-DLC films were deposited in each pipe under the same working pressure. The results show that when multiple pipes are deposited at the same time, the DLC films with high hardness (11–12 GPa), low friction coefficient (0.123–0.168), low wear rate (2.65 × 10 −7 –3.46 × 10 −7 mm 3 N −1 m −1 ) and low corrosion current density (more than an order of magnitude lower than SS304) are deposited in each pipe, and the DLC films on the internal surface of multiple pipes display good uniformity. The method mentioned in this study provides theoretical guidance for industrial production of DLC films on the internal surface of pipes. • DLC films were simultaneously deposited on the internal surface of multiple pipes. • The DLC films through the deposition technology possess good properties and uniformity. • The deposition technology provides theoretical guidance in industrial production.