Hydrophobic oxidized aluminum (Al Al2O3 ) surfaces exhibiting negligible contact angle hysteresis were prepared by chemical vapor depostion (CVD) of bis((tridecafluoro-1,1,2,2,tetrahydrooctyl)-dimethylsiloxy)methylsilane (F₂?H). XPS and AFM confirmed that our facile CVD method produces monolayers with thicknesses of ~1.2 ㎚ on the Al Al2O3 surfaces without discernible change in surface morphology. After F26H monolayer deposition, hydrophilic Al Al2O3 surface became hydrophobic and exhibited virtually no water contact angle hysteresis (advancing/receding water contact angles (θ A /θ R )=110°/109°). Water droplets on these low-hysteresis hydrophobic surfaces moved very easily without “pinning”. They also show excellent anti-collosion properties.