Phase-modulation scatterometry

Phase-modulation scatterometry is a metrology technique for determining, by means of a phase modulator as a key device, the parameters of gratings. The main source of error to be dealt with are the fluctuations of the phase-modulation amplitude. The grating zeroth-order reflectance modulated by the phase modulator is converted into a signal by the photodetector. The measurables are the direct term and the first two harmonics of the signal. For experimental data fitting, we used the ratio of the harmonics over the direct term because it significantly improves the accuracy. A sensitivity analysis was performed for two samples, one real and one theoretical, to find the measurement configuration that insures optimum determination precision for the grating parameters. For the real sample, comparison of the theoretical predictions for sensitivity with the actual values showed a good agreement. For both samples the sensitivity analysis indicated subnanometric precision for the critical dimension (grating linewidth).