신뢰성을 고려한 전기-열-구조 연성계에 대한 위상최적설계

Reliability-based design optimization (RBDO) has receives high attentions in an optimization society together with topology optimization. The goal of the probabilistic optimization is to consider the variations of performances caused by uncertainties. A micro-actuator is a standard component in micro-electro-mechanical-systems (MEMS). Among many types of micro-actuators, electro-thermo-mechanical devices are being paid attention from a topology optimization society. Previous works showed the new design of the actuator using a topology optimization technique or presented that convection phenomena played important role when applying a topology optimization technique to electro-thermo-mechanical devices. In this research, design sensitivity analysis(DSA) for the electric-thermal-structural system is reviewed and DSA for the input current is presented. As an application, an electric-thermal actuator from a RF switch is designed using both deterministic and reliability-based topology optimization (RBTO).