A long-stroke MEMS actuator based on cascaded stages of innovative pass-through comb fingers

A long-stroke Micro-Electro-Mechanical System (MEMS) actuator, based on an innovative pass-through comb finger mechanism using cascaded stages, is presented, fabricated with a dual-layer process, and experimentally tested. Thanks to the novel electrostatic actuation system here proposed, the actuator is able to generate a displacement of 30 mu m, fora proof-mass footprint of 1 x 1.1 mm(2) at only < 60 V actuation. Experimental tests well-agree with predictions obtained a-priori with the numerical model. The work thus proves the design strategy of such a remarkable comb-finger mechanism, and opens the path to anew class of long-stroke, electrostatically driven, MEMS actuators.