Glass-based Microstrip Antenna with Air Cavity for High Gain

This paper proposes a Ku-band cavity antenna for integrated packaging. The whole structure uses glass with micro-grooves as the substrate, and SOG and Parylene-N film on the upper part forms a cavity structure. The antenna pattern is fabricated on top of the film. The ground plane is on the bottom of a glass substrate. The optimized antenna has a thinner thickness and higher radiation performance. The antenna has a maximum gain of 9.6 dBi and an impedance bandwidth of 0.17 GHz. An all-glass antenna is designed for a comparative study, and it is found that the maximum gain of the design in this paper can be increased by 39%.