材料科学
光电探测器
响应度
无定形固体
光电子学
制作
X射线光电子能谱
溅射
纳米技术
薄膜
化学工程
工程类
病理
医学
有机化学
化学
替代医学
作者
Shujuan Cui,Zengxia Mei,Yonghui Zhang,Huili Liang,Xiaolong Du
标识
DOI:10.1002/adom.201700454
摘要
A solution to the fabrication of amorphous Ga 2 O 3 solar‐blind photodetectors on rigid and flexible substrates at room temperature is reported. A robust improvement in the response speed is achieved by delicately controlling the oxygen flux in the reactive radio frequency magnetron sputtering process. Temporal response measurements show that the detector on quartz has a fast decay time of 19.1 µs and a responsivity of 0.19 A W −1 as well, which are even better than those single crystal Ga 2 O 3 counterparts prepared at high temperatures. X‐ray photoelectron spectroscopy and current–voltage tests suggest that the reduced oxygen vacancy concentration and the increased Schottky barrier height jointly contribute to the faster response speed. Amorphous Ga 2 O 3 solar‐blind photodetector is further constructed on polyethylene naphthalate substrate. The flexible devices demonstrate similar photoresponse behavior as the rigid ones, and no significant degradation of the device performance is observed in bending states and fatigue tests. The results reveal the importance of finely tuned oxygen processing gas in promoting the device performance and the applicability of room‐temperature synthesized amorphous Ga 2 O 3 in fabrication of flexible solar‐blind photodetectors.
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