SEM and Raman studies of CNT films on porous Si

Carbon nanotube (CNT) films deposited on different porous silica substrates were studied by Scanning Electron Microscopy (SEM) and Raman Spectroscopy (RS). The films samples were prepared by a two-step method consisting of PVD and CVD processes. In the first step the nanocomposite Ni-C film was obtained by evaporation in dynamic vacuum from two separated sources of fullerenes and nickel acetate. Those films were deposited on porous silica and DLC/porous silica substrates. Analysis of SEM imaging showed that the obtained film are composed of carbon nanotubes, the distribution, size and quality of which depend on the type of substrate. The CNT films were studied by RS method to determine the influence of the substrate type on disordering of carbonaceous structure and quality of CNT in deposited films.