加速度计
微电子机械系统
压电
灵敏度(控制系统)
压电加速度计
梁(结构)
材料科学
加速度
声学
线性
悬臂梁
光电子学
压电传感器
验证质量
振动
电气工程
电子工程
光学
物理
工程类
复合材料
经典力学
量子力学
作者
Yan Liu,Bohao Hu,Yao Cai,Wenjuan Liu,Alexander Tovstopyat,Chengliang Sun
出处
期刊:Sensors
[MDPI AG]
日期:2021-01-11
卷期号:21 (2): 453-453
被引量:14
摘要
Microelectromechanical (MEMS) piezoelectric accelerometers are diversely used in consumer electronics and handheld devices due to their low power consumption as well as simple reading circuit and good dynamic performance. In this paper, a tri-axial piezoelectric accelerometer with folded beams is presented. The four beam suspensions are located at two sides of the mass aligned with edges of the mass, and the thickness of the beams is the same as the thickness of the mass block. In order to realize the multi-axis detection, a total of 16 sensing elements are distributed at the end of the folded beams. The structural deformations, stress distribution, and output characteristics due to the acceleration in x-, y-, and z-axis directions are theoretically analyzed and simulated. The proposed accelerometer is fabricated by MEMS processes to form Mo/AlN/ScAlN/Mo piezoelectric stacks as the sensing layer. Experiments show that the charge sensitivity along the x-, y-, and z-axes could reach up to ~1.07 pC/g, ~0.66 pC/g, and ~3.35 pC/g. The new structure can provide inspiration for the design of tri-axial piezoelectric accelerometers with great sensitivity and linearity.
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