Resonant-type inertial impact linear piezoelectric motor based on coupling of driving and clamping parts

Abstract A resonant-type inertial impact linear piezoelectric motor based on coupling of driving and clamping parts was designed and manufactured. The motor mainly includes stator (coupling of driving and clamping parts), mover (slider) and auxiliary parts. The driving part works in the resonant state under the excitation of single harmonic, which mainly realizes the function of reciprocating driving. Similarly, under the single harmonic driving, the clamping part also works in the resonant state to realize the clamping function. Through the coupling between the two parts of the stator, the mover is driven to move continuously in one direction. The inertial impact piezoelectric motor works in the resonant state because the driving and clamping parts work in the resonant state respectively. Compared with the traditional quasi-static inertial impact motor, this study novelly changes the working state of the inertial impact motor. Through the finite element simulation software COMSOL 5.2 , the resonant frequency coupling of the driving and the clamping part is consistent. An experimental platform was built to verify the feasibility of the principle by testing the motor prototype. The experiment results show that: The maximum speed reaches 78 mm s −1 when the motor prototype is operated at the frequency of 810 Hz with a preload of 2 N and the working voltages of clamping and driving parts of motor were set at 80 and 220 V p-p respectively. Meanwhile, the maximum load of the motor prototype can reach 5 N. The minimum resolution of the motor prototype is 6.379 μ m.