The alkyltrichorosilane(OTS) monolayers are prepared by self assembled technique. The topographies of self assembled OTS monolayers are characterized and analyzed by atomic force microscopy. The results indicate that the topographies of self assembled OTS monolayers are functions of the time of formation. The topographies of monolayers become constant with the time increasing. In the meantime, the topographies are also dependant on the composition of solvent.