Microanalysis Using Secondary Ion Mass Spectrometry

Abstract Secondary ion mass spectrometry (SIMS) has inherent features of high sensitivity, great dynamic range, and capability to provide spatially resolved chemical information making it well suited for trace and microanalysis of diverse materials. The various SIMS methods used to derive the boron distribution in hepatoma cells, to investigate the intcr‐iayer reactions in multi‐layer ceramic structural materials, and to evaluate the effects of fabrication on microstructural and functional properties in semiconductor devices, are presented to illustrate possible roles of SIMS in microanalysis.