Improvement of graphene–metal contact resistance by introducing edge contacts at graphene under metal

We report an alternative approach to lower contact resistance and extend charge transfer length by forming graphene antidot arrays under metal electrode to introduce edge contact of graphene. The edge contact resistivity of ∼2.2 × 10−9 Ω·cm2 is experimentally estimated, based on the experiment and one-dimensional equivalent circuit model, and the result agrees well with the previous theoretical report. The proposed contact module structure can open alternative ways to overcome the poor contact performance and the current crowding effect at the metal-graphene contact.