High quality factor silicon-on-lithium niobate metasurfaces for electro-optically reconfigurable wavefront shaping.

Dynamically reconfigurable metasurfaces promise compact and lightweight spatial light modulation for many applications, including LiDAR, AR/VR, and LiFi systems. Here, we present a metasurface with full, electrically-driven independent control of its constituent nanoantennas, full phase tunability, and high tuning efficiency. Our metasurface consists of high quality factor Si nanoantenna bars atop lithium niobate. Free-space light couples to guided modes within each nanobar via subtle geometric perturbations; the resulting nanobars exhibit quality factors exceeding 30,000, while maintaining bar spacing <$\lambda$/1.5. Applying a voltage across individual nanoantennas shifts the spectral position of the high-Q resonance, modifying the antenna phase and amplitude. In reflection, we achieve nearly 2$\pi$ phase variation within an applied bias not exceeding $\pm$ 25 V, while maintaining a reflection efficiency above 91%. Utilizing this platform we numerically demonstrate a high angle, 51$^{\circ}$, switchable beamsplitter with a diffracted efficiency of 93%. We also show how this same platform, with different voltages, can be used as an angle-tunable beamsteerer that diffracts light to varying angles, spanning 18-31$^{\circ}$, with up to 86% efficiency. Our platform provides a foundation for highly efficient wavefront shaping devices with a wide dynamic tuning range capable of generating nearly any transfer function.