Electrically and thermally tunable multifunctional terahertz metasurface array

In this paper we propose a kind of all-solid-state and a hybrid electrically and thermally tunable multifunctional metasurface array based on the graphene pattern and vanadium dioxide configuration, which can realize the functions of band-stop filtering, beam steering, and beam splitting. When ${\mathrm{VO}}_{2}$ is in the dielectric state, this metasurface can be used as an angle-insensitive filter that can realize the function of the dual-frequency adjustable band-stop filtering by changing the Fermi level of graphene in the range of 4.11--6.51 THz. When ${\mathrm{VO}}_{2}$ is in the metal state, this metasurface can be used as a terahertz phased array device. By changing the Fermi level of graphene and the phase distribution, it is proved that this metasurface can achieve a specific deflection angle, a continuous scanning range of 0--$68.{37}^{\ensuremath{\circ}}$, or beam splitting at angles of $\ifmmode\pm\else\textpm\fi{}25.{56}^{\ensuremath{\circ}}$ and $\ifmmode\pm\else\textpm\fi{}59.{29}^{\ensuremath{\circ}}$. Our work shows great potential in the field of multifunctional integrated chips.