聚焦离子束
材料科学
微电子
透射电子显微镜
扫描电子显微镜
纳米技术
制作
离子铣床
复合材料
离子
化学
医学
替代医学
有机化学
病理
图层(电子)
作者
Takeo Kamino,Toshie Yaguchi,Tsuyoshi Ohnishi,K. Umemura,Satoshi Tomimatsu
标识
DOI:10.1017/s1431927600035042
摘要
The focused ion beam(FIB) technique, developed for the microelectronics industry has become a major method for site specific transmission electron microscopy(TEM) specimen preparation in a wide range of materials[l]. The FIB lift-out technique has improved the specimen preparation procedures by removing complicated initial fabrication required prior to the FIB milling[2]. However, conventional FIB techniques are still having increased difficulty in meeting failure analysis needs from high technology industries such as microelectronics. We have developed a site specific TEM specimen preparation method using a combination of an FIB instrument and an intermediate voltage TEM equipped with a scanning attachment [3]. In this method, the specimen is mounted on an FIB-TEM compatible specimen holder, so that localization of the specific site can be carried out in the FIB and TEM using the same holder. The scanning electron imaging mode may be used to observe surface structures of the milled area, and the scanning transmission electron microscopy(STEM) mode may be used to observe structures inside of the milled surface.
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