TiO/sub 2/ thin films prepared by sol-gel method for oxygen microsensor application

Polycrystalline TiO/sub 2/ thin films have been prepared via a sol-gel method. The film morphology, crystalline phase and chemical composition have been characterized through scanning electron microscopy, X-ray diffraction, and Rutherford backscattering spectrometry. The oxygen sensing characteristics and sensitivity enhancement have been investigated and optimized. The gas sensitivity of TiO/sub 2/ thin films for the detection of oxygen in the concentration range 10 ppm to 1%, has been evaluated. A sensitivity range between 5 to 8 at working temperatures of 270/spl deg/C to 320/spl deg/C has been achieved.