Fluorinated MOF‐Based Hexafluoropropylene Nanotrap for Highly Efficient Purification of Octafluoropropane Electronic Specialty Gas

Abstract High‐purity octafluoropropane (C 3 F 8 ) electronic specialty gas is a key chemical raw material in semiconductor and integrated circuit manufacturing industry, while selective removal of hexafluoropropylene (C 3 F 6 ) impurity for C 3 F 8 purification is essential but a challenging task. Here we report a fluorinated cage‐like MOF Zn‐bzc‐CF 3 (bzc=5‐(trifluoromethyl)‐1H‐pyrazole‐4‐carboxylic acid) for C 3 F 6 /C 3 F 8 separation. The incorporation of −CF 3 groups not only provides suitable pore aperture size for highly efficient size‐exclusive C 3 F 6 /C 3 F 8 separation, but also creates hydrophobic microenvironments, endowing Zn‐bz‐CF 3 high chemical stability. Remarkably, Zn‐bzc‐CF 3 exhibits high C 3 F 6 adsorption capacity while excluding C 3 F 8 , achieving ideal molecular‐sieving C 3 F 6 /C 3 F 8 separation. Breakthrough experiments show that Zn‐bzc‐CF 3 can efficiently separate C 3 F 6 /C 3 F 8 mixture and high‐purity C 3 F 8 (99.9 %) can be obtained.