铁电性
材料科学
电介质
光电子学
场效应晶体管
制作
非易失性存储器
退火(玻璃)
氧化物
极化(电化学)
晶体管
半导体
纳米技术
电气工程
电压
冶金
化学
物理化学
替代医学
病理
工程类
医学
作者
Y.-N. Wang,Yuchen Cai,Shu‐Hui Li,Xueying Zhan,Ruiqing Cheng,Zhenxing Wang,Jun He,Feng Wang
出处
期刊:Small
[Wiley]
日期:2024-12-24
标识
DOI:10.1002/smll.202409922
摘要
Ferroelectric field-effect transistors (FeFETs) commonly utilize traditional oxide ferroelectric materials for their strong remanent polarization. Yet, integrating them with the standard complementary metal oxide semiconductor (CMOS) process is challenging due to the need for lattice matching and the high-temperature rapid thermal annealing process, which are not always compatible with CMOS fabrication. However, the advent of the ferroelectric semiconductor α-In
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