成交(房地产)
平版印刷术
纳米技术
循环(图论)
蓝图
软件部署
光学接近校正
信号(编程语言)
毫秒
计算机科学
信号处理
制作
人工智能
钥匙(锁)
计算机硬件
光学工程
抖动
可制造性设计
纳米结构
管道运输
数字光处理
稳健性(进化)
多路复用
电子工程
反问题
作者
Mingyu Cheng,Xinyi Chen,Jinglan Zhang,Ye Xu,Bin Ai
摘要
The rapid deployment of intelligent energy, health-care and manufacturing platforms is outpacing the capabilities of conventional transducers, demanding sub-percent accuracy, millisecond responses, long-term stabilities and wafer-scale integration. Plasmonic micro- and nano-optical sensors can, in principle, satisfy these metrics, but only if three historically separate research threads converge: (i) physics-guided nanostructure design that realises high-Q hybrid resonances; (ii) fabrication routes that translate these blueprints into low-cost, large-area devices; and (iii) data-centric signal processing and prediction that extracts reliable information from inherently weak, drift-prone optical read-outs. This review (mainly covering the years 2019-2024) provides the first end-to-end account of that convergence. We highlight shadow-sphere lithography (SSL) as a scalable, sub-50 nm patterning strategy; map the resulting structural library onto its plasmonic, lattice and bound-state resonances; and show how physics-aware artificial-intelligence (AI) pipelines denoise spectra, compensate batch variability, enhance the prediction, and even invert the design problem. We close by outlining a closed-loop roadmap-linking SSL, plasmonics, and AI analytics-that targets high refractive-index resolutions within millimetre footprints, while identifying open challenges in wafer-scale 3D patterning inverse design and automated self-assembly, to in-line quality grading, to adaptive signal interpretation.
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