Electroplating Process of Functional Ni-Fe Alloy Film in Hard Disk Drive Head Wafer

The electroplating process of functional Ni-Fe alloy used in hard disk drive head wafer process was developed.The plating procedures and parameters such as main salt,additive,bath temperature,pH value,current density,stirring condition and film composition were introduced and investigated,and the magnetic properties of Ni-Fe film was determined.The results showed that the performance of Ni-Fe alloy film could meet the requirement of hard disk drive head wafer.This Ni-Fe alloy plating process had been successfully applied in the manufacture of hard disk drive head wafer.