Preparation process of trichlorosilane

Two preparation processes of trichlorosilane for producing polysilicon are described including process flow,process characteristics and structure of core equipment.The raw materials of improved Siemens process are silica powder and hydrogen chloride,which has wide material sources and low cost.The raw materials of hydrochlorination process are silicon tetrachloride,hydrogen,silica powder and hydrogen chloride,which provide an outlet for unwieldy silicon tetrachloride and enhance the utilization rate of materials.Both of the processes have advantages of low energy consumption and less pollution,which is important for society,economy and environment.