Parameters Optimization for a Capacitive Six-Axis Force/Torque Sensor by Using Analytical Method

Parameters optimization is crucial for improving the sensing performance of capacitive six-axis force/torque (F/T) sensors. Based on the analytical model, this article designed a capacitor for sensing the different axis F/T as well as presented a novel performance evaluation function for the parameters optimization. This performance evaluation function can effectively represent the relationship between structural parameters and the sensor sensitivity as well as the isotropy. From the results of the parameters optimization, the sensor is manufactured and the experimental evaluation is analyzed. Comparing with the commercial six-axis F/T capacitive sensor, there is a more superior sensing performance for the developed sensor. This proposed parameters optimization method is expected to improve the sensing performance for the capacitive six-axis F/T sensor and expand its application.