Improved electrical performance of lateral β-Ga2O3 MOSFETs utilizing slanted fin channel structure

In this Letter, lateral slanted-fin-channel β-Ga2O3 metal-oxide-semiconductor field effect transistors (MOSFETs) are demonstrated. A 600-nm thick n-type doped channel layer is adopted to improve output characteristics. The tri-gate structure enhances gate control in the proposed β-Ga2O3 MOSFETs, showing an on/off ratio as high as 109. In particular, the slanted-fin-channel structure, mainly located in the gate region, reduces the peak electric field in the Ga2O3 channel due to the gradual regulation of a threshold voltage. The slanted-fin-channel β-Ga2O3 MOSFETs show a breakdown voltage (Vbr) of 2400 V and a power figure-of-merit of 193 MW/cm2, which are almost 2 and 5.5 times larger, respectively, than those of conventional straight-fin-channel devices. These results imply that the slanted-fin channel structure provides a viable way of fabricating high-performance β-Ga2O3 MOSFET power devices.