随时间变化的栅氧化层击穿
MOSFET
材料科学
栅氧化层
量子隧道
氧化物
介电强度
俘获
泄漏(经济)
光电子学
撞击电离
电介质
电场
电离
化学
电气工程
电压
晶体管
物理
离子
有机化学
工程类
宏观经济学
生态学
冶金
量子力学
生物
经济
作者
Yiping Xiao,Chaoming Liu,Yanqing Zhang,Chunhua Qi,Guoliang Ma,Tianqi Wang,Mingxue Huo
标识
DOI:10.1109/ted.2023.3324281
摘要
The long-term reliability of SiC power MOSFETs under total ionizing dose (TID) effects was investigated in this article. Time-dependent dielectric breakdown (TDDB) test showed that the degradation behavior of the gate leakage current is dependent on the bias voltage. At a critical gate bias of 43.5 V, the gate leakage current first increases and then decreases before oxide breakdown. In this case, the effects of hole trapping, interface trap depassivation, as well as electron trapping during Fowler–Nordheim (FN) tunneling occur sequentially within the oxide, as described by the composite model. After total dose radiation, the oxide breakdown time is markedly reduced, while the leakage current degradation pattern remains unchanged. This is attributed to radiation-induced oxide trapped charges and additional acceptor-type defects, which modulate the oxide electric field and alter the FN tunneling barrier.
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