锡
材料科学
钯
扩散阻挡层
金属间化合物
膜
氮化钛
渗透
箔法
钒
溅射
化学工程
氮化物
氢
钛
冶金
薄膜
合金
复合材料
图层(电子)
催化作用
纳米技术
化学
有机化学
工程类
生物化学
作者
Cameron M. Burst,Chao Li,J. Douglas Way,Colin A. Wolden
出处
期刊:Membranes
[MDPI AG]
日期:2025-02-21
卷期号:15 (3): 68-68
被引量:2
标识
DOI:10.3390/membranes15030068
摘要
Hydrogen purification is a critical industrial process, and there are ongoing efforts to develop low-cost alternatives to palladium foil membranes. Titanium nitride (TiN) is studied as an interdiffusion barrier to enable hydrogen permeation in composite palladium–vanadium membranes. TiN was deposited via reactive sputtering, and films with the desired (200) orientation were obtained in the metallic regime at 400 °C under a 200 V bias to the substrate. The permeability of thin-film TiN was determined with palladium-based sandwich structures. TiN layers up to 10 nm resulted in a minimal decrease in flux (~20%) relative to a freestanding PdCu foil, which was attributed to the interfacial resistance. At greater thicknesses, the TiN layer was rate-limiting, and it was found that the effective permeability of the sputtered TiN thin films was ~6 × 10−12 mol s−1 m−1 Pa−0.5. Composite Pd|TiN|V|TiN|Pd membranes exhibited permeability values up to three times greater than pure palladium, exhibiting stability at 450 °C for over 100 h, with the lack of intermetallic diffusion and alloy formation being confirmed with XRD. The membranes were unstable at 500 °C, which was attributed to the instability of the thin Pd layer and loss of catalytic activity.
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