微通道板探测器
微通道
光学
极紫外光刻
平方(代数)
失真(音乐)
物理
材料科学
望远镜
光电子学
几何学
纳米技术
数学
CMOS芯片
探测器
放大器
作者
Xiaoxuan Shi,Juan Liu,Sanzhao Wang,Puguang Song,Xian Zhang,Yuechong Feng,Tiezhu Bo,Chen Wang,Feng Zhang,Hui Liu
出处
期刊:Sixth Symposium on Novel Optoelectronic Detection Technology and Applications
日期:2020-04-17
被引量:1
摘要
The optical imaging system is the the core device in the extrem ultraviolet (EUV) astronomical telescope. Because of its light weight, large field of view, high resolution, the lobster-eye optical imaging system is considered to be the best imaging system for EUV. The curved square hole microchannel plate is an imitation lobster-eye type optical imaging system. The channels of the traditional curved square hole microchannel plate are generally arranged in a square shape, and the image is a cross image, which only the cross area is effectively detected, so the detection efficiency is low. In this paper, all the square hole channels are pointed to the center by radial arrangement, thereby the detection efficiency is improved. However, this arrangement cannot achieve close alignment, and there are a large number of voids in the structure, which reduces the density of the focusing unit. In this paper, the simulation of the radial arrangement of the square hole microchannel structure is carried out by Tracepro simulation software. Through the high-precision wire drawing method, radial arrangement technology, and distortion-free control, the drawing precision of the square wire is improved, the square wire structure defects are eliminated, and the square hole microchannel plate with uniform structural height is prepared.
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