期刊:Journal of vacuum science & technology [American Institute of Physics] 日期:1987-07-01卷期号:5 (4): 2297-2300被引量:10
标识
DOI:10.1116/1.574439
摘要
As a back-up experiment for investigations on first-wall carbon coatings of toroidal machines, we constructed the RIKEN ECR-2 device and carried out simulation experiments. By electron cyclotron resonance discharges we obtain an amorphous, hard, and dense carbon film. It is possible to decrease the atomic H/C ratio of carbon films by high-energy ion bombardment. Harmful carbon films deposited on observation windows can be cleaned up by a local pure hydrogen plasma.