材料科学
场电子发射
纳米线
光电子学
阴极
共发射极
兴奋剂
碳化硅
蚀刻(微加工)
电流密度
纳米技术
阳极
制作
硅
宽禁带半导体
电子
带隙
工作职能
领域(数学)
场发射显示器
冷阴极
功勋
各向同性腐蚀
碳化物
作者
Hengxu Wu,Zuohui Liu,Zhiming Xiao,Maoxiang Hou,Ma Li,Yun Chen,Xin Chen
标识
DOI:10.1021/acsami.5c18634
摘要
Field emission (FE) cathodes have shown considerable potential for utilization in vacuum electronic devices. In the field of cathode materials, silicon carbide (SiC) has garnered significant attention due to its exceptional properties. To enhance the FE performance of SiC field emitters, where the turn-on field (Eto) and emission current stability are critical performance parameters, the fabrication of SiC nanowires with sharp tip structures and elemental doping are effective strategies. In this study, the Al-doped bamboo-like SiC nanowire array field emitter was fabricated by a two-step process involving electrochemical etching followed by ex-situ doping. The SiC nanowires fabricated by electrochemical etching exhibit sharp tip structures and well-aligned arrangements, which are favorable for electron emission. In addition, ex-situ Al doping effectively reduces the bandgap of SiC and increases the density of localized states, thereby further enhancing its electron emission performance. The synergistic effects of the sharp bamboo-like morphology, highly ordered array, and Al doping result in a low Eto of 0.34 V/μm. Moreover, the emitter demonstrates exceptional emission stability, with only 1.3% current fluctuation over 12 h of continuous operation. Overall, its performance merit surpasses that of previously reported SiC emitters. This work presents a viable strategy for designing field emitters that simultaneously achieve a low turn-on field and high emission stability.
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