随时间变化的栅氧化层击穿
磁阻随机存取存储器
外推法
材料科学
隧道磁电阻
凝聚态物理
光电子学
随机存取存储器
电气工程
计算机科学
复合材料
工程类
物理
电压
数学分析
栅氧化层
晶体管
数学
图层(电子)
计算机硬件
作者
J. H. Lim,Nagarajan Raghavan,V. B. Naik,J. Kwon,K. Yamane,Hyunwoo Yang,K.H. Lee,K. L. Pey
标识
DOI:10.1109/irps.2019.8720611
摘要
Magnesium oxide (MgO) has become a dielectric of growing importance, given its use in spin-transfer torque magnetic random access memory (STT-MRAM) devices as a magnetic tunnel junction (MTJ). From recent research studies by several groups, it is apparent that the fundamental physics of time dependent dielectric breakdown (TDDB) in MgO is different from HfO 2 and SiO 2 due to several factors which include ultra-thin dielectric (<;1 nm), ferromagnetic material interfaces on both sides, different energetics of the defects and the combination of "very high" current density and "very low" voltage of operation in STT-MRAM technology. These factors have an impact on the TDDB lifetime extrapolation model that can be used for M gO reliability qualification. We analyze the applicability of the commonly proposed (I) ξ-model, (II) 1/ξ model and (III) power law model for front-end dielectrics and assess the suitability of each of them using evidence from large sample size TDDB tests performed on MTJ arrays at various voltage and temperature stress conditions. The most suited extrapolation model along with an underlying physical explanation that supports it will be presented. Our analysis reveals that a combination of the power law and thermochemical ξ-model would best represent MgO dielectric breakdown (BD).
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