Effects of Oxygen Flow Rate on the Structural and Optical Properties of Copper Oxide Films Deposited by DC Reactive Magnetron Sputtering

Copper oxide films were deposited on glass substrates by DC reactive magnetron sputtering with various oxygen flows rates.The structure and optical properties of the films were studied by X-ray diffractometer,double-beam spectrophotometer,respectively.The optical constants and thicknesses of the films were obtained from the simulation of normal incidence transmittance.The results show that the copper oxide changes from Cu2O to Cu4O3 and CuO as the oxygen flow rate increases from 6 to 9 and 12 sccm.When the rate of oxygen flow rate to Ar flow rate is 6:25,the film is Cu2O and optical band gap is 2.49 eV,and the optical constants decrease with increasing wavelength.The refractive index and extinction coefficient increase with the increase of oxygen flow rate.