Lv1
10 积分 2026-07-30 加入
Optimization method of optical proximity correction for mitigation of H-V CD bias and local CD variation in DRAM hexagonal array features induced by mask 3D and curved slit at EUV lithography
19小时前
已完结
A lab-scale EUV high-intensity exposure setup for small-spot exposures and angular-resolved photoelectron spectroscopy
20小时前
已完结
Evaluation of accelerated reticle lifetime testing using different applied bias voltages at EBL2
23小时前
已完结
Evaluation of electron penetration depth under electron beam irradiation below 400 eV for beyond EUV
1天前
已完结
Corner-focused evaluation of AI-based design-to-real prediction for FPD photomasks
1天前
已完结
Hybrid photomask registration measurement system for high-precision and high-speed registration metrology
1天前
已完结
Self-affine fractal abrasive model for ultra-flat surface fabrication of mask blank substrates
1天前
已完结
Optical components for lithography systems using cordierite ceramics
1天前
已完结
Extend existing platform capacity to mature node mask inspection
3天前
已完结
Validation of a new metrology solution for main-flow legacy photomasks
3天前
已完结
First-principles study on the nucleation and growth mechanisms of Al₃Sc and Al₃Zr precipitates in aluminum alloys
20小时前
待审核
First-principles study on the nucleation and growth mechanisms of Al₃Sc and Al₃Zr precipitates in aluminum alloys
20小时前
已采纳
Elucidating the thermal properties and anomalous transport in the 18R polytype of SnSe2
20小时前
已采纳
Cation alkyl polyglycoside for preparation of mesoporous silica and direct synthesis of mesoporous carbon
23小时前
已采纳
Cholesterol-lowering effects of oat β-glucan: a meta-analysis of randomized controlled trials
23小时前
已采纳
Clay mineral mediated dynamics of CO2 hydrate formation and dissociation: Experimental insights for carbon sequestration
23小时前
已采纳
Employing corn derived products to reduce the corrosivity of pavement deicing materials
23小时前
待审核
Co-transplantation of pancreatic islets with adipose-derived mesenchymal stem cells in vascularized kidney ECM scaffolds to restore type 1 diabetes mellitus
1天前
已采纳
Central TSC2 missense mutations are associated with a reduced risk of infantile spasms
1天前
已采纳
Resolving the paradox of conflicting glacial chronologies: Reconstructing the pattern of deglaciation of the Magellan cordilleran ice dome (53–54°S) during the last glacial – interglacial transition
1天前
已采纳
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