Valveless pumping using traversing vapor bubbles in microchannels

Pumping of fluids in microchannels using the movement of a single or multiple vapor bubble(s) is proposed, analyzed, and demonstrated. The pumping mechanism requires no micromechanical moving parts for actuation by utilizing asymmetric heating which creates a variation in vapor pressure and surface tension due to the heater-induced temperature gradient along the channel. A heat and mass transfer analysis was performed to understand the pumping mechanism and estimate the pumping capability of the micropumping device. To verify the concept and our analysis, a pumping device with a transparent microchannel with a hydraulic diameter of 3.4 μm was fabricated on a silicon wafer using surface micromachining. Experimental results with the first generation device have shown pumping of isopropanol at velocities as high as 160 μm/s (0.5 nl/min flow rate) with a pressure head of approximately 800 Pa.