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High-Efficiency of PVD Coating Process by Applying an Additional Rotation

涂层 固定装置 材料科学 扫描电子显微镜 物理气相沉积 旋转(数学) 基质(水族馆) 蒸发 沉积(地质) 复合材料 工程制图 机械工程 计算机科学 工程类 古生物学 人工智能 地质学 物理 海洋学 热力学 生物 沉积物
作者
Ivan Mrkvica,Tomáš Szotkowski,Aneta Slaninkova,TIBOR JURGA
出处
期刊:Coatings [Multidisciplinary Digital Publishing Institute]
卷期号:12 (6): 834-834 被引量:4
标识
DOI:10.3390/coatings12060834
摘要

This article analyzes PVD coatings (physical vapor deposition—the coating material is vaporized and deposited by sputtering or arc evaporation, and PVD coatings are applied at lower substrate temperatures and thus can be applied to a wider range of substrates) applied to samples which are located in a fixture. This fixture enables additional rotation of the sample via the coating process. The fixture allows an increase of coated tools in one batch, and therefore an increase of the current capacity of the coating machine. The introductory section of the article describes the process of product design, including its modifications. The experimental section is focused on the functionality checking of the proposed design. The coating process was carried out on a machine named INNOVA. To guarantee the correct coating application during the process, it is necessary to research the coating thickness and the chemical composition of the samples and compare these results with the results of samples which were coated without using a designed fixture. Round bars with a diameter of 10 mm were chosen as test samples. On these samples, a FUTURA monolayer was applied on a TiAlN base. Chemical composition and coating thickness were evaluated using a scanning electron microscope (SEM). Using a fixture with a fourth rotation, the same chemical composition and coating thickness were achieved as those samples which were coated in a process without the use of a fourth rotation. Therefore, it was possible to confirm a capacity increase of the coating machine.
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