Monolithic silicon matrix detector with 50 μm photon counting pixels

A 48-element monolithic matrix detector, designed for parallel fluorescence detection, has been fabricated in silicon and tested. The pixels are single photon avalanche diodes (SPADs) with 50 µm diameter, ordered in a 6× 8 array with 240 µm pitch. The photon detection efficiency is remarkably uniform over the array: it has a peak of 48% at 530 nm and it is higher than 30% over all the visible range. Low dark counting rate (DCR) is obtained in operation at moderately low temperature (−15°C with thermoelectric cooling): the individual pixel DCR is 60 c s−1 for about 40% of the elements and it is below 5700 c s−1 in the rest of the array. It was verified that the afterpulsing probability is below 1% and that the optical crosstalk probability between elements is lower than 0.2%. Based on this matrix detector, we have developed a versatile and compact (20 cm× 8 cm × 4 cm) photon counting module that can be easily interfaced to a PC via USB link.