TiN and In2O3 Co-sputtered Amorphous InTiON Electrodes for Perovskite Solar Cells

We report on transparent conducting TiN co-sputtered In 2 O 3 electrodes prepared by multi-cathode magnetron sputtering at room temperature for use as transparent anodes in perovskite solar cells (PSCs).The completely amorphous structure with low resistivity of 1.29 × 10-3 Ω-cm, work function of 4.69 eV, and high optical transmittance of 83.78 % was produced by addition of Ti and N structural stabilizers in the In 2 O 3 matrix, making amorphous InTiON (a-ITON) films suitable for use as transparent anodes in PSCs.In addition, the a-ITON films exhibited good mechanical flexibility under substrate bending due to their stable amorphous structure.Compared to amorphous ITO-based PSC, which exhibited a power conversion efficiency (PCE) of 12.07 %, the PSC with a-ITON showed a higher PCE of 13.74 % due to higher optical transmittance inducing a higher photocurrent.The suitability of an a-ITON electrode suggests it as a potential candidate to substitute for conventional oxide electrodes.