制作
卷到卷处理
过程(计算)
材料科学
基质(水族馆)
机械工程
数码产品
过程控制
转印
传输(计算)
纳米技术
复合材料
计算机科学
工程类
电气工程
地质学
操作系统
病理
并行计算
海洋学
替代医学
医学
作者
Qishen Zhao,Christopher Martin,Nan Hong,Dongmei Chen,Wei Li
出处
期刊:IEEE-ASME Transactions on Mechatronics
[Institute of Electrical and Electronics Engineers]
日期:2023-02-28
卷期号:28 (5): 2832-2839
被引量:10
标识
DOI:10.1109/tmech.2023.3243123
摘要
With the advancement of manufacturing technology in transfer printing and two-dimensional materials fabrication, roll-to-roll (R2R) dry transfer by mechanical peeling is becoming a promising process for efficient transfer of thin film materials from a donor substrate to a target substrate for device fabrication. As a key process variable, the peeling angle determines the loading condition of the R2R dry transfer process and thus the quality of the transferred material. Controlling the peeling angle is challenging in a R2R process because of the adhesion energy and peeling front velocity in addition to the flexible substrates involved in the peeling process. In this article, a real-time supervisory control strategy is developed for the R2R mechanical peeling process. A strain energy-based peeling process model is employed to estimate the peeling front velocity and the adhesion energy. The real-time estimation is then used to generate reference signals for web tension controllers to track the desired peeling angles. The proposed control strategy is demonstrated with both simulation and experimental results.
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