Reconfigurable THz metamaterial based on microelectromechanical cantilever switches with a dimpled tip

We numerically and experimentally proposed a reconfigurable THz metamaterial (MM) by employing microelectromechanical cantilevers into a ladder-shaped MM (LS-MM). A fixed-free cantilever array with a dimpled tip behaved as Ohmic switches to reshape the LS-MM so as to actively regular the transmission response of THz waves. The cantilever tip was designed to be a concave dimple to improve the operational life without sacrificing the mechanical resonant frequency (fmr), and a fmr of 635 kHz was demonstrated. The device actively achieved a 115-GHz change in transmittance resonant frequency and a 1.82-rad difference in transmission phase shift, which can practically benefit advancing THz applications such as fast THz imaging and 6 G communications.