Fast optical phased array on a 300-mm silicon platform

We present an optical phased array parameter analysis for automotive and handheld device applications and preliminary results from a 1×16 silicon optical phased array using p-i-n phase shifters built on a 300-mm industrial platform to reach high-speed operation and low power consumption at a 1.55𝜇𝑚 wavelength. Using 2 𝜇𝑚-spaced grating antennas OPA with theoretical beam steering range of 48°, we demonstrate a beam steering range of ±4° while average power consumption after the beam-shape optimization is measured to be 12.6 mW. Experimental setup, beam forming and scanning are discussed and a final analysis on future large-scale OPA integration is made.