The Impact of Ultrashort Femtosecond Pulse-Shaping Technology for Micromachining
作者
Marcos Dantus
标识
DOI：10.1109/cleo.2007.4453749
摘要
Ultrashort laser pulses improve micromachining but they suffer significant phase distortions when focused by microscope objectives. Breakthrough technology to correct high order phase distortions is used to improve the machining characteristics of metals and semiconductors.
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(2025-6-4)
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