Preparation of Flowerlike Indium Oxide Films by a Simple CVD Method

Indium oxide flowerlike films were prepared on glass substrate by a simple chemical vapor deposition (CVD) coating technique. The results showed the products on the glass surface are flowerlike body centered cubic structure of In2O3 films. The flowerlike microstructures are distributed uniformly and have less overlapping, the diameters of them are about 3 µm. The deposition mechanism and the morphologies control procedure of the In2O3 were studied. As the reaction time increases, the morphologies of the microstructures were changed from cocoon-like particles to hybrid thin films, and flowerlike microstructures at last. This novel CVD method might provide a simple route for synthesizing other metal oxide or compound films.